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Applications of In Situ Transmission Electron Microscopy to the Characterization of Process-Induced Defects
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TEM Techniques for 2D Junction Delineation and Correlation with SIMS and SRP
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Defect Generation in Cz-Silicon Used for the Design of Synchrotron Monochromator Crystals
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X-Ray Diffractometry and Topography of CdHgTe Bulk Crystals and CdHgTe-CdTe Epitaxial Structures
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HomeSolid State PhenomenaSolid State Phenomena Vols. 19-20TEM Techniques for 2D Junction Delineation and...

TEM Techniques for 2D Junction Delineation and Correlation with SIMS and SRP

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Gettering and Defect Engineering in Semiconductor Technology IV

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Periodical:

Solid State Phenomena (Volumes 19-20)

Pages:

449-454

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.19-20.449

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Online since:

January 1991

Authors:

A. Romano-Rodríguez, Jan Vanhellemont, A. De Keersgieter, W. Vandervorst, J.R. Morante

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© 1991 Trans Tech Publications Ltd. All Rights Reserved

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