Applications of In Situ Transmission Electron Microscopy to the Characterization of Process-Induced Defects

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Periodical:

Solid State Phenomena (Volumes 19-20)

Edited by:

M. Kittler and H. Richter

Pages:

439-448

DOI:

10.4028/www.scientific.net/SSP.19-20.439

Citation:

M. Reiche and J. Heydenreich, "Applications of In Situ Transmission Electron Microscopy to the Characterization of Process-Induced Defects", Solid State Phenomena, Vols. 19-20, pp. 439-448, 1991

Online since:

January 1991

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$35.00

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