Interaction of Implanted into Silicon Fluorine with Radiation Defects

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Periodical:

Solid State Phenomena (Volumes 19-20)

Edited by:

M. Kittler and H. Richter

Pages:

411-416

Citation:

L.Y. Krasnobaev et al., "Interaction of Implanted into Silicon Fluorine with Radiation Defects", Solid State Phenomena, Vols. 19-20, pp. 411-416, 1991

Online since:

January 1991

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