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Defect Structures in Si Preamorphized Wafers
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HomeSolid State PhenomenaSolid State Phenomena Vols. 19-20Evolution of Monoclinic SiAs Precipitates in...

Evolution of Monoclinic SiAs Precipitates in Heavily As⁺ Implanted and Isothermally Annealed Silicon

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Periodical:

Solid State Phenomena (Volumes 19-20)

Pages:

393-398

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.19-20.393

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Online since:

January 1991

Authors:

Aldo Armigliato, Andrea Parisini, M. Derdour, P. Lazzari, L. Moro, D. Nobili, Sandro Solmi

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© 1991 Trans Tech Publications Ltd. All Rights Reserved

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