B-Ion Implantation into Mo-Film for Shallow Junction Formation: DLTS Analyses on the p+/n Fabricated Diodes

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Periodical:

Solid State Phenomena (Volumes 19-20)

Edited by:

M. Kittler and H. Richter

Pages:

505-510

DOI:

10.4028/www.scientific.net/SSP.19-20.505

Citation:

A. Poggi et al., "B-Ion Implantation into Mo-Film for Shallow Junction Formation: DLTS Analyses on the p+/n Fabricated Diodes", Solid State Phenomena, Vols. 19-20, pp. 505-510, 1991

Online since:

January 1991

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$35.00

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