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HomeSolid State PhenomenaSolid State Phenomena Vols. 19-20B-Ion Implantation into Mo-Film for Shallow...

B-Ion Implantation into Mo-Film for Shallow Junction Formation: DLTS Analyses on the p⁺/n Fabricated Diodes

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Periodical:

Solid State Phenomena (Volumes 19-20)

Pages:

505-510

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.19-20.505

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Online since:

January 1991

Authors:

Antonella Poggi, R. Angelucci, E. Susi, M. Merli

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© 1991 Trans Tech Publications Ltd. All Rights Reserved

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