Electrical Evaluation of Silicon on Insulator Structures Formed by Oxygen Implantation by Means of Frequency Resolved Photoconductivity Measurements

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Periodical:

Solid State Phenomena (Volumes 19-20)

Edited by:

M. Kittler and H. Richter

Pages:

511-516

DOI:

10.4028/www.scientific.net/SSP.19-20.511

Citation:

F. Coromina et al., "Electrical Evaluation of Silicon on Insulator Structures Formed by Oxygen Implantation by Means of Frequency Resolved Photoconductivity Measurements", Solid State Phenomena, Vols. 19-20, pp. 511-516, 1991

Online since:

January 1991

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$35.00

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