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HomeSolid State PhenomenaSolid State Phenomena Vols. 19-20Electrical Stability of Thin Nitroxide Layers on...

Electrical Stability of Thin Nitroxide Layers on Silicon after RTO/RTN/RTO-Treatment

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Periodical:

Solid State Phenomena (Volumes 19-20)

Pages:

599-604

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.19-20.599

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Online since:

January 1991

Authors:

G. Weidner, G. Prösch, A. Beyer, M. Wolf, V. Rank, M. Kopp

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© 1991 Trans Tech Publications Ltd. All Rights Reserved

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