Electrical Stability of Thin Nitroxide Layers on Silicon after RTO/RTN/RTO-Treatment

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Periodical:

Solid State Phenomena (Volumes 19-20)

Edited by:

M. Kittler and H. Richter

Pages:

599-604

DOI:

10.4028/www.scientific.net/SSP.19-20.599

Citation:

G. Weidner et al., "Electrical Stability of Thin Nitroxide Layers on Silicon after RTO/RTN/RTO-Treatment", Solid State Phenomena, Vols. 19-20, pp. 599-604, 1991

Online since:

January 1991

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$35.00

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