Defect Characterization of Thick SOI-Layers and Eptaxial Grown Layers on SOI Substrates

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Periodical:

Solid State Phenomena (Volumes 19-20)

Edited by:

M. Kittler and H. Richter

Pages:

617-624

DOI:

10.4028/www.scientific.net/SSP.19-20.617

Citation:

K. Höppner et al., "Defect Characterization of Thick SOI-Layers and Eptaxial Grown Layers on SOI Substrates", Solid State Phenomena, Vols. 19-20, pp. 617-624, 1991

Online since:

January 1991

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$35.00

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