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HomeSolid State PhenomenaSolid State Phenomena Vols. 19-20Defect Characterization of Thick SOI-Layers and...

Defect Characterization of Thick SOI-Layers and Eptaxial Grown Layers on SOI Substrates

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Gettering and Defect Engineering in Semiconductor Technology IV

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Periodical:

Solid State Phenomena (Volumes 19-20)

Pages:

617-624

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.19-20.617

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Online since:

January 1991

Authors:

K. Höppner, Bernd Tillack, R. Banisch, H.H. Richter, O. Joachim

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© 1991 Trans Tech Publications Ltd. All Rights Reserved

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