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HomeSolid State PhenomenaSolid State Phenomena Vols. 19-20Temperature Profiles Induced by Recrystallization...

Temperature Profiles Induced by Recrystallization of Silicon-on-Insulator with Scanning Incoherent Light Line Source

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Gettering and Defect Engineering in Semiconductor Technology IV

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Periodical:

Solid State Phenomena (Volumes 19-20)

Pages:

631-638

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.19-20.631

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Online since:

January 1991

Authors:

H.H. Richter, H. Andrä, Bernd Tillack, O. Joachim, W. Weinelt, R. Banisch, K. Hoeppner

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© 1991 Trans Tech Publications Ltd. All Rights Reserved

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