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HomeSolid State PhenomenaSolid State Phenomena Vol. 247RHEED Study of the Texture in Polycrystalline...

RHEED Study of the Texture in Polycrystalline Films of Magnetite Grown on Oxidized Silicon Surface

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Abstract:

Polycrystalline films of magnetite (Fe₃O₄) with thickness of 75 nm were grown on SiO₂/Si (001) surface by reactive deposition of Fe in O₂ atmosphere. The growth of Fe₃O₄ films was conducted with the different oxygen pressures. The structure of films was monitored by reflection high-energy electron diffraction (RHEED) during the film growth. It was found that there is a range of oxygen pressure in which the growth of only textured Fe₃O₄ film takes place. Reactive deposition of Fe at lower oxygen pressure results in a growth of Fe₃O₄ film without a texture. In contrast at the deposition with higher oxygen pressure the texture in the Fe₃O₄ film remains but the appearance of hematite (α-Fe₂O₃) is observed.

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Solid State Phenomena (Volume 247)

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118-123

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https://doi.org/10.4028/www.scientific.net/SSP.247.118

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Online since:

March 2016

Authors:

Vyacheslav V. Balashev*, Victor A. Vikulov, Tatiana A. Pisarenko, Vladimir V. Korobtsov

Keywords:

Crystal Structure, Hybrid Heterostructure, Magnetic Films, Magnetite, Reactive Deposition, RHEED Pattern, Textured Films

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© 2016 Trans Tech Publications Ltd. All Rights Reserved

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