Effects of Bias Voltage on Microstructure, Hardness and Bonding Strength of TiN Coating Deposited by High Power Pulsed Magnetron Sputtering

Abstract:

Generally, bias voltage exercises a great influence on micro-properties (morphology, preferred orientation, mechanical properties, and so on) of the coatings in the process of coating deposited. In order to more systematically explore the influence of bias voltage on microstructure, hardness and adhesion of TiN coatings, TiN coatings were deposited successfully on the surface of 316 stainless steel by high power pulsed magnetron sputtering (HPPMS). A field emission scanning electron microscopy equipped with energy dispersive spectrometer (FESEM/EDS) and an X-ray diffractometer were employed to analyze the surface morphology, chemical composition and phase structure of coatings, respectively. And a nanoindentation and scratch tester was used to investigate the hardness, elastic modulus and adhesion of TiN coatings. Results showed that bias voltage has a great influence on surface morphology of TiN coatings. Moreover, bias voltage can promote preferential orientation and the phase in TiN coating is mainly TiN with a small amount of Ti₂N. The influence of bias voltage on the hardness and modulus of TiN coating is not obvious, however, the binding force increases fast first and then decreases slow with the increase of bias voltage. TiN coating has excellent performance when bias voltage is-100V.

• Periodical: Solid State Phenomena (Volume 281)
• Pages: 534-539
• DOI: https://doi.org/10.4028/www.scientific.net/SSP.281.534
• Online since: August 2018
• Authors: Wei Jie Chang, Hao Zhang, Xue Xue, Shuang Liu, Jian Feng Yang, Xue Zhang, Lin Long, Shu Wang Duo*
• Keywords: Bias Voltage, HPPMS, Mechanical Properties, Microstructure, TiN Coating

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