Polydimethylsiloxane Micro-Channels Application for the Study of Dynamic Wetting of Nano-Etched Silicon Surfaces Based on Acoustic Characterization Method

Abbas Ramez Salhab; Julien Carlier; Pierre Campistron; Marc Neyens; Malika Toubal; Bertrand Nongaillard; Vincent Thomy

doi:10.4028/www.scientific.net/SSP.314.143

Paper Titles

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Removal of SOC Hard Mask for Patterning of Work Function Metal by Thermally Activated Ozone Gas
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High Performance, Eco-Friendly SPM Cleaning Technology Using Integrated Bench-Single Wafer Cleaning System
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Polydimethylsiloxane Micro-Channels Application for the Study of Dynamic Wetting of Nano-Etched Silicon Surfaces Based on Acoustic Characterization Method
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Characterization of Wetting of Deep Silica Nanoholes by Aqueous Solutions Using ATR-FTIR
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Effect of Hydrophobicity and Surface Potential of Silicon on SiO₂ Etching in Nanometer-Sized Narrow Spaces
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Formulation and Evaluation of Diluted Sulfuric-Peroxide-HF (DSP+) Mixtures for Cleaning High-Aspect Ratio Contacts in 3D NAND
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New Test Structure Development for Pattern Collapse Evaluations
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HomeSolid State PhenomenaSolid State Phenomena Vol. 314Polydimethylsiloxane Micro-Channels Application...

Polydimethylsiloxane Micro-Channels Application for the Study of Dynamic Wetting of Nano-Etched Silicon Surfaces Based on Acoustic Characterization Method

Abstract:

Efficient cleaning of contaminations in the semiconductor industry is a determining factor in ensuring the good quality of the electronics products. We present here the dynamic wetting characterization of a fluid on top of DTI structures using ultra-high frequency acoustic method. The dynamics of the fluid will be established using a PDMS micro-channel placed on top of the structures, in order to obtain conditions as close as possible to those used in the industrial process. Wetting state of the DTI structures is determined based on the measured acoustic reflection coefficient.

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Periodical:

Solid State Phenomena (Volume 314)

Pages:

143-149

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.314.143

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Online since:

February 2021

Authors:

Abbas Ramez Salhab*, Julien Carlier, Pierre Campistron, Marc Neyens, Malika Toubal, Bertrand Nongaillard, Vincent Thomy

Keywords:

Acoustics, Deep Trench Isolation, Micro and Nano-Technology, Microelectronics, Microfluidics, Non-Destructive Testing, Piezoelectric Transducers, Surface Cleaning, Wetting

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