Removal of SOC Hard Mask for Patterning of Work Function Metal by Thermally Activated Ozone Gas

Shota Iwahata; Masaki Inaba; Farid Sebaai; Efrain Altamirano-Sanchez

doi:10.4028/www.scientific.net/SSP.314.127

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Removal of SOC Hard Mask for Patterning of Work Function Metal by Thermally Activated Ozone Gas
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Removal of SOC Hard Mask for Patterning of Work Function Metal by Thermally Activated Ozone Gas

Abstract:

Thermally activated ozone gas (TAO) was demonstrated as an alternative technology to conventional spin-on carbon (SOC) stripping. The SOC stripping rate with ozone gas was found to be a function of substrate temperature and actual ozone amount calculated from the ozone flow rate and concentration. Furthermore, work function metal (WFM) stripping rate showed a high selectivity to SOC films, and the amount of oxidation TiN, which is a WFM metal, was also equivalent to conventional technology of SOC stripping. This TAO gas process can be used in clean tools, making it a promising integrated solution for SOC stripping followed by post clean.