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HomeSolid State PhenomenaSolid State Phenomena Vol. 346Modeling of Capillary Pattern Collapse on Sub-5nm...

Modeling of Capillary Pattern Collapse on Sub-5nm Pillars Using Molecular Dynamics

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Abstract:

Molecular dynamics simulations were used to model <100> silicon pillars with diameter and spacing of 2.2nm and in a square lattice. Isopropanol (IPA) was added as a wetting liquid, and evaporation of the IPA was simulated to induce capillary forces that can cause pattern collapse. The cylinders were stable up to an aspect ratio of 8, while pillars higher than that collapsed. Additionally we simulated the thermal vibration of silicon pillars with diameters and spacing of both 2.2nm and 4.3nm without the presence of liquid at 300K. The Young's modulus of these pillars was estimated using the mean square displacement of the vibrating pillar tips, and results showed that the modulus decreases significantly from the bulk value for these structures.

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Periodical:

Solid State Phenomena (Volume 346)

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117-122

DOI:

https://doi.org/10.4028/p-dHiWm4

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Online since:

August 2023

Authors:

Derek W. Bassett*, Dipak Aryal, Antonio Rotondaro

Keywords:

Modeling, Molecular Dynamics, Pattern Collapse, Simulation

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© 2023 Trans Tech Publications Ltd. All Rights Reserved

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