Silicon Nitride Selective Functionalization with Aqueous Cellulose

Kenji Mochida

doi:10.4028/p-0VXgy2

Paper Titles

Observation of Capillary Condensation and Pattern Bending Phenomena in Si Nanopillars Using In Situ TEM
p.105

Improvement of Fingering-Induced Pattern Collapse by Adjusting Chemical Mixing Procedure
p.111

Modeling of Capillary Pattern Collapse on Sub-5nm Pillars Using Molecular Dynamics
p.117

Insights into FinFET Structure Collapse: A Reactive Force Field-Based Molecular Dynamics Investigation
p.123

Silicon Nitride Selective Functionalization with Aqueous Cellulose
p.131

Selective Si₃N₄ Etching for 3D NAND Integration by Using Low Concentration of H₃PO₄
p.137

Investigation of Oxide Regrowth in the Selective Si₃N₄ Etching Process for 3D NAND Fabrication by Using Finite Element Modeling Simulation
p.143

Methods for Uniform Wet Etching in Narrow Trenches and Vias
p.149

Application of Hydrosol to Aerosol Based Metrology to Predict Wafer Defects from Process Chemical Contamination
p.157

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Silicon Nitride Selective Functionalization with Aqueous Cellulose

Abstract:

In semiconductor device manufacturing, it is often necessary to process devices that incorporate both Si₃N₄ and SiO₂ with etching solutions. Recently, we found that a cellulose-based polymer (DC01) selectively adsorbs onto silicon nitride and acts as a protective film against etching with buffered fluoric acid. However, the mechanism behind this selective adsorption remains unclear, and a protective film persists after etching. QCM measurements and calculations of the surface free energy indicate that the affinity between DC01 and Si₃N₄ was significantly stronger than that of SiO₂. Notably, the same behavior was not observed with cellulose or cellulose acetate, indicating that this phenomenon is unique to our original cellulose. Additionally, we successfully prepared films using a facile dipping method. Furthermore, we discovered that the strongly adhesive DC01 film can be completely removed by subjecting it to oxidative conditions, such as SC-1 or SC-2.