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HomeSolid State PhenomenaSolid State Phenomena Vols. 37-38Thermal Stability of Glass Substrates During Solid...

Thermal Stability of Glass Substrates During Solid Phase Crystallisation of a-Si on Glass by Rapid Thermal Annealing

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Polycrystalline Semiconductors III

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Periodical:

Solid State Phenomena (Volumes 37-38)

Pages:

547-552

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.37-38.547

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Online since:

March 1994

Authors:

L. Plévert, L. Haji, M. Bonnel, N. Duhamel, B. Loisel

Keywords:

Crystallization, Glass Deformation, Rapid Thermal Annealing (RTA), Thin Film Transistor

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© 1994 Trans Tech Publications Ltd. All Rights Reserved

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