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HomeSolid State PhenomenaSolid State Phenomena Vols. 44-46Hydrogenated Amorphous Silicon Thin Film...

Hydrogenated Amorphous Silicon Thin Film Transistors with a Single Layered SiO₂ Gate Insulator

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Abstract:

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Hydrogenated Amorphous Silicon

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Periodical:

Solid State Phenomena (Volumes 44-46)

Pages:

973-982

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.44-46.973

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Online since:

July 1995

Authors:

Sun Kyu Kim, Kwang Seok Lee, J.H. Kim, C.H. Hong, Jin Jang

Keywords:

Hydrogenated Amorphous Silicon, Plasma Treatment, SiO₂, TFT

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© 1995 Trans Tech Publications Ltd. All Rights Reserved

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