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HomeSolid State PhenomenaSolid State Phenomena Vols. 51-52Influence of the Technological Parameters on the...

Influence of the Technological Parameters on the Mechanical Properties of Thick Epipolysilicon Layers for Micromechanical Sensors

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Polycrystalline Semiconductors IV

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Periodical:

Solid State Phenomena (Volumes 51-52)

Pages:

423-428

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.51-52.423

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Online since:

May 1996

Authors:

M.S. Benrakkad, J.M. Lopez-Villegas, J.R. Morante, M. Offenberg

Keywords:

Epipolysilicon, Micromechanics, Raman Spectroscopy

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© 1996 Trans Tech Publications Ltd. All Rights Reserved

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