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HomeSolid State PhenomenaSolid State Phenomena Vols. 51-52Compensation Doping of Polysilicon Films for...

Compensation Doping of Polysilicon Films for Stable Integrated Circuit Resistors

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Polycrystalline Semiconductors IV

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Periodical:

Solid State Phenomena (Volumes 51-52)

Pages:

561-566

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.51-52.561

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Online since:

May 1996

Authors:

M. Rydberg, U. Smith, A. Söderbärg, H. Hansson

Keywords:

Compensation Doping, Electrical Stress, Hydrogen Sensitivity, Scanning Probe Microscope, Thermal Stress, Thin Film Resistor

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© 1996 Trans Tech Publications Ltd. All Rights Reserved

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