Compensation Doping of Polysilicon Films for Stable Integrated Circuit Resistors

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Periodical:

Solid State Phenomena (Volumes 51-52)

Edited by:

S. Pizzini, H.P. Strunk and J.H. Werner

Pages:

561-566

DOI:

10.4028/www.scientific.net/SSP.51-52.561

Citation:

M. Rydberg et al., "Compensation Doping of Polysilicon Films for Stable Integrated Circuit Resistors", Solid State Phenomena, Vols. 51-52, pp. 561-566, 1996

Online since:

May 1996

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$35.00

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