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HomeSolid State PhenomenaSolid State Phenomena Vols. 6-7SOI-Films by Zone Melting Recrystallization of...

SOI-Films by Zone Melting Recrystallization of Polycrystalline Silicon

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Gettering and Defect Engineering in Semiconductor Technology III

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Periodical:

Solid State Phenomena (Volumes 6-7)

Pages:

507-516

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.6-7.507

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Online since:

January 1989

Authors:

W. Bertoldi, Bernd Tillack

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© 1989 Trans Tech Publications Ltd. All Rights Reserved

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