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HomeSolid State PhenomenaSolid State Phenomena Vols. 6-7

Solid State Phenomena Vols. 6-7

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.6-7

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Paper Title Page

Preface

Defect Engineering in VLSI-Technologies

Authors: H. Reimer, W. Nitzsche, Manfred Reiche

1

Gettering in Silicon by Oxygen Related Defects, Stacking Faults and Thin Polycrystalline Films

Authors: Robert J. Falster

13

Advances in the Understanding of Oxygen and Carbon in Silicon

Authors: Cor Claeys, Jan Vanhellemont

21

Investigations of the Structure, Formation, and Annihilation of Thermally Induced Donors in Silicon

Authors: J. Reichel, Manfred Reiche, H. Geuther

33

Effect of Volume Defects on Gold Gettering in CZ-SI

Authors: K. Schmalz, I. Babanskaya, H. Gdanitz, F.G. Kirscht

41

Investigations of the Behaviour of Transition Metals in Silicon

Authors: W. Nitzsche, O. Brodersen, S. Hopfe, Manfred Reiche, I. Burck

49

Defect Engineering for Bicmos-Technology

Authors: G. Ritter, K.-E. Ehwald, P. Schley

57

Investigation of Gettering Phenomena in Semiconductors by Simultaneous Charge Collection Microscopy and Cathodoluminescence

Authors: M. Eckstein, A. Jakubowicz, M. Bode, H.U. Habermeier

65

Implantation Induced Defect Modification in P Doped Bipolar Structures

Authors: D. Krueger, J. Dziesiaty

73

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