For Libraries For Publication Open Access Downloads About Us Contact Us
Paper Titles
Preface
Defect Engineering in VLSI-Technologies
p.1
Gettering in Silicon by Oxygen Related Defects, Stacking Faults and Thin Polycrystalline Films
p.13
Advances in the Understanding of Oxygen and Carbon in Silicon
p.21
Investigations of the Structure, Formation, and Annihilation of Thermally Induced Donors in Silicon
p.33
Effect of Volume Defects on Gold Gettering in CZ-SI
p.41
Investigations of the Behaviour of Transition Metals in Silicon
p.49
Defect Engineering for Bicmos-Technology
p.57
Investigation of Gettering Phenomena in Semiconductors by Simultaneous Charge Collection Microscopy and Cathodoluminescence
p.65

Preface

Article Preview

Abstract:

By email View Pdf
You might also be interested in these eBooks
Gettering and Defect Engineering in Semiconductor Technology III View Preview

Info:

Periodical:

Solid State Phenomena (Volumes 6-7)

Online since:

January 1989

Сopyright:

© 1989 Trans Tech Publications Ltd. All Rights Reserved

Share:

© 2025 Trans Tech Publications Ltd. All rights are reserved, including those for text and data mining, AI training, and similar technologies. For open access content, terms of the Creative Commons licensing CC-BY are applied.
Scientific.Net is a registered trademark of Trans Tech Publications Ltd.