Volumes

Solid State Phenomena
Vols. 21-22

Solid State Phenomena
Vols. 19-20

Solid State Phenomena
Vols. 17-18

Solid State Phenomena
Vols. 15-16

Solid State Phenomena
Vols. 13-14

Solid State Phenomena
Vol. 12

Solid State Phenomena
Vol. 11

Solid State Phenomena
Vol. 10

Solid State Phenomena
Vols. 8-9

Solid State Phenomena
Vols. 6-7

Solid State Phenomena
Vol. 5

Solid State Phenomena
Vols. 3-4

Solid State Phenomena
Vols. 1-2

HomeSolid State PhenomenaSolid State Phenomena Vols. 6-7

Solid State Phenomena Vols. 6-7

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.6-7

Export:

ToC:

Table of Contents

<
1
2
3
4
5
…
>
>>

Paper Title Page

The Properties of the Defects in Heavy Implanted Silicon

Authors: V.G. Litovchenko, B.N. Romanyuk

79

Defect Formation and Lateral Oxidation during Locos Processing

Authors: D. Knoll, T. Grabolla, K.-E. Ehwald

93

Defects and Their Influence on Parasitic Devices in Integrated Circuits

Authors: R. Prejdova

101

Volume Defect Formation in CZ SI Wafers and Related Electrical Effects

Authors: F.G. Kirscht, P. Fricke, J. Reichel, I. Babanskaya, R. Bertoldi, G. Buchheim, C. Hansch, P. Hübler, H.-J. Machold, R. Scharfe

103

Buried Layer Processing for Advanced Bipolar Technology

Authors: Eddy Simoen, L. Deferm, Jan Vanhellemont, Cor Claeys

111

Oxygen Precipitation in Silicon: Correlation of the Experimental Results Obtained with IR Spectroscopy, Preferential Etching and X-Ray Topography

Authors: Erzsébet Hild, J. Seres, E.K. Pal, S. Nouredin, T. Kormàny

119

Gettering of Fast Diffusing Impurities by Radiation Defects in III-V Semiconductors

Authors: C. Ascheron, M. Rieth, H.A. Klose

127

On the Two-Step Nucleation in Internal Gettering for CMOS Fabrication Process

Authors: J. Jablonski, K. Kucharski, J. Wojciechowski

129

Creation of Deep Denuded Zones in CZ Silicon Wafers

Authors: G. Kissinger, W. Kissinger, K. Tittelbach, K. Schmalz

135

Defect Engineering for ULSI Epitaxial Silicon

Authors: George A. Rozgonyi, R.R. Kola

143

<
1
2
3
4
5
…
>
>>