Creation of Deep Denuded Zones in CZ Silicon Wafers

Abstract:

Article Preview

Info:

Periodical:

Solid State Phenomena (Volumes 6-7)

Edited by:

M. Kittler

Pages:

135-142

Citation:

G. Kissinger et al., "Creation of Deep Denuded Zones in CZ Silicon Wafers", Solid State Phenomena, Vols. 6-7, pp. 135-142, 1989

Online since:

January 1989

Export:

Price:

$38.00

Fetching data from Crossref.
This may take some time to load.