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Paper Titles
On the Two-Step Nucleation in Internal Gettering for CMOS Fabrication Process
p.129
Creation of Deep Denuded Zones in CZ Silicon Wafers
p.135
Defect Engineering for ULSI Epitaxial Silicon
p.143
Computer-Simulation of Gold-Redistribution in Silicon
p.159
An Attempt to Simulate Oxygen Precipitation in Silicon
p.165
Defect Formation in Dislocation-Free Silicon Containing Oxygen
p.171
Influence of Preannealing on Oxygen Precipitation
p.173
Silicon Intrinsic Gettering Durability and Effectiveness
p.179
Effect of Heat Treatment on Defect Formation in Silicon
p.181

An Attempt to Simulate Oxygen Precipitation in Silicon

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Periodical:

Solid State Phenomena (Volumes 6-7)

Pages:

165-170

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.6-7.165

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Online since:

January 1989

Authors:

M. Macek

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© 1989 Trans Tech Publications Ltd. All Rights Reserved

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