On the Two-Step Nucleation in Internal Gettering for CMOS Fabrication Process

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Periodical:

Solid State Phenomena (Volumes 6-7)

Edited by:

M. Kittler

Pages:

129-134

DOI:

10.4028/www.scientific.net/SSP.6-7.129

Citation:

J. Jablonski et al., "On the Two-Step Nucleation in Internal Gettering for CMOS Fabrication Process", Solid State Phenomena, Vols. 6-7, pp. 129-134, 1989

Online since:

January 1989

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$35.00

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