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HomeSolid State PhenomenaSolid State Phenomena Vols. 6-7Volume Defect Formation in CZ SI Wafers and...

Volume Defect Formation in CZ SI Wafers and Related Electrical Effects

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Gettering and Defect Engineering in Semiconductor Technology III

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Periodical:

Solid State Phenomena (Volumes 6-7)

Pages:

103-110

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.6-7.103

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Online since:

January 1989

Authors:

F.G. Kirscht, P. Fricke, J. Reichel, I. Babanskaya, R. Bertoldi, G. Buchheim, C. Hansch, P. Hübler, H.-J. Machold, R. Scharfe

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© 1989 Trans Tech Publications Ltd. All Rights Reserved

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