Volumes

Solid State Phenomena
Vols. 21-22

Solid State Phenomena
Vols. 19-20

Solid State Phenomena
Vols. 17-18

Solid State Phenomena
Vols. 15-16

Solid State Phenomena
Vols. 13-14

Solid State Phenomena
Vol. 12

Solid State Phenomena
Vol. 11

Solid State Phenomena
Vol. 10

Solid State Phenomena
Vols. 8-9

Solid State Phenomena
Vols. 6-7

Solid State Phenomena
Vol. 5

Solid State Phenomena
Vols. 3-4

Solid State Phenomena
Vols. 1-2

HomeSolid State PhenomenaSolid State Phenomena Vols. 1-2

Solid State Phenomena Vols. 1-2

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.1-2

Export:

ToC:

Table of Contents

1
2
3
>

Paper Title Page

Preface

Characterization of Ion-Implanted Heavily-Doped Silicon by Optical Reflection

Authors: A. Borghesi, G. Guizzetti, L. Nosenzo

1

Modeling of Oxygen Depth Profiles in High Dose Oxygen-Implanted Silicon

Authors: H. Jaeger

11

Channeling, RBS and Mössbauer Measurements on ¹⁵¹Eu Implanted Si

Authors: A. Bhagawat, M.B. Kurup, K.G. Prasad, R.P. Sharma

33

Cross-Sectional Transmission Electron Microscope Study of Bf₂+-Implanted (001) and (111) Silicon

Authors: Lih Juann Chen, C.W. Nieh, Chih Hsing Chu

45

EBIC-Investigation of the Dislocation-Impurity Interaction in Silicon

Authors: I.E. Bondarenko, Eugene B. Yakimov

59

Dopant Anomalous Diffusion Induced in Silicon by Ion Implantation

Authors: Sandro Solmi, Marco Servidori

65

Electrical Characterization of Buried Layers in Silicon

Authors: Wolfgang R. Fahrner, E. Klausmann

85

Mechanism of Buried Oxide Formation by Implanted Oxygen

Authors: J. Stoemenos

115

Diffusion of Ion-Implanted Group III and V Impurities in SlO₂

Authors: A.H. Van Ommen

133

1
2
3
>