Cross-Sectional Transmission Electron Microscope Study of Bf2+-Implanted (001) and (111) Silicon

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Periodical:

Solid State Phenomena (Volumes 1-2)

Edited by:

D. Stievenard and J.C. Bourgoin

Pages:

45-58

Citation:

L. J. Chen et al., "Cross-Sectional Transmission Electron Microscope Study of Bf2+-Implanted (001) and (111) Silicon", Solid State Phenomena, Vols. 1-2, pp. 45-58, 1988

Online since:

January 1991

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Price:

$38.00

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