Cross-Sectional Transmission Electron Microscope Study of Bf2+-Implanted (001) and (111) Silicon

Abstract:

Article Preview

Info:

Periodical:

Solid State Phenomena (Volumes 1-2)

Edited by:

D. Stievenard and J.C. Bourgoin

Pages:

45-58

DOI:

10.4028/www.scientific.net/SSP.1-2.45

Citation:

L. J. Chen et al., "Cross-Sectional Transmission Electron Microscope Study of Bf2+-Implanted (001) and (111) Silicon", Solid State Phenomena, Vols. 1-2, pp. 45-58, 1988

Online since:

January 1991

Export:

Price:

$35.00

In order to see related information, you need to Login.