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HomeSolid State PhenomenaSolid State Phenomena Vols. 1-2Diffusion of Ion-Implanted Group III and V...

Diffusion of Ion-Implanted Group III and V Impurities in SlO₂

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Ion Implantation in Semiconductors

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Periodical:

Solid State Phenomena (Volumes 1-2)

Pages:

133-152

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.1-2.133

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Online since:

January 1988

Authors:

A.H. Van Ommen

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© 1988 Trans Tech Publications Ltd. All Rights Reserved

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