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HomeSolid State PhenomenaSolid State Phenomena Vols. 6-7Heterogeneous Ion Synthesis of Isolating Layers in...

Heterogeneous Ion Synthesis of Isolating Layers in Si

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Gettering and Defect Engineering in Semiconductor Technology III

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Periodical:

Solid State Phenomena (Volumes 6-7)

Pages:

517-524

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.6-7.517

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Online since:

January 1989

Authors:

M.Yu. Barabanenkov, A.F. Borun, A.B. Danilin, A.A. Malinin, V.N. Mordkovich

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© 1989 Trans Tech Publications Ltd. All Rights Reserved

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