Integrated Cleaning: Application of Densified Fluid Cleaning (DFC) to Post-Etch Residue Removal

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Periodical:

Solid State Phenomena (Volumes 65-66)

Edited by:

Marc Heyns, Marc Meuris and Paul Mertens

Pages:

195-198

DOI:

10.4028/www.scientific.net/SSP.65-66.195

Citation:

V. Starov et al., "Integrated Cleaning: Application of Densified Fluid Cleaning (DFC) to Post-Etch Residue Removal", Solid State Phenomena, Vols. 65-66, pp. 195-198, 1999

Online since:

November 1998

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Price:

$35.00

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