Volumes

Solid State Phenomena
Vols. 76-77

Solid State Phenomena
Vols. 73-75

Solid State Phenomena
Vol. 72

Solid State Phenomena
Vol. 71

Solid State Phenomena
Vols. 69-70

Solid State Phenomena
Vols. 67-68

Solid State Phenomena
Vols. 65-66

Solid State Phenomena
Vols. 63-64

Solid State Phenomena
Vols. 61-62

Solid State Phenomena
Vols. 59-60

Solid State Phenomena
Vols. 57-58

Solid State Phenomena
Vol. 56

Solid State Phenomena
Vol. 55

HomeSolid State PhenomenaSolid State Phenomena Vols. 65-66

Solid State Phenomena Vols. 65-66

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.65-66

Export:

ToC:

Table of Contents

1
2
3
4
5
…
>
>>

Paper Title Page

Preface and Committees

The Rinsing Problem: Effect of Solute-Surface Interactions on Wafer Purity

Authors: Lee M. Loewenstein, Paul W. Mertens

1

Hydrogenated Ultrapure Water Production System for Future Wet Cleaning Process

Authors: Hiroshi Morita, Jun ichi Ida, T. Mizuniwa, Tadahiro Ohmi

7

Behaviour of Metallic Contaminants during Mos Processing

Authors: Twan Bearda, Stefan De Gendt, Lee M. Loewenstein, M. Knotter, Paul W. Mertens, Marc Heyns

11

Hydrogen Peroxide Decomposition in Ammonia Solutions

Authors: D. Martin Knotter, Stefan De Gendt, M. Baeyens, Paul W. Mertens, Marc Heyns

15

New Aspects of the Diluted Dynamic Clean Process

Authors: F. Tardif, T. Lardin, A. Maciejny, Adrien Danel, Pieter Boelen, C. Cowache, Ismail Kashkoush, R. Novak

19

Single Step Alkaline Cleaning Solution for Advanced Semiconductor Cleaning

Authors: M. Baeyens, W. Hub, Bernd O. Kolbesen, A.R. Martin, Paul W. Mertens

23

Particle Removal Efficiency and Silicon Roughness in HF-DIW/O₃/Megasonics Cleaning

Authors: Mauro Alessandri, Enrico Bellandi, Francesco Pipia, F. Cazzaniga, K. Wolke, M. Schenkl

27

Industrial Trends in Wet Processing Technology

Authors: L.F.Tz. Kwakman, M. Geomini, Didier Lévy, D. Malgouyres

31

Particle Addition Behaviour of Oxide Stripping by HF Solutions

Authors: Enrico Bellandi, Mauro Alessandri, Francesco Pipia, A. Tonti

35

1
2
3
4
5
…
>
>>