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HomeSolid State PhenomenaSolid State Phenomena Vols. 65-66

Solid State Phenomena Vols. 65-66

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.65-66

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Paper Title Page

Microscopic Analysis of Particle Removal by Gas/Liquid Mixture High-Speed Flow

Authors: N. Hirano, K. Takayama, J. Falcovitz, T. Kataoka, Kunio Shimada, E. Ando

207

Kelvin-SPV Measurements of Atomically-Flat Si(111) Surfaces Contaminated with Metallic Ions

Authors: T. Tagawa, Tsugunori Okumura

211

Comparison of Analytical Methods for Residue Detection of Resist Removal Processes

Authors: T. Riihisaari, J. Likonen, Arto Kiviranta, S. Eränen, S. Lehto, J. Tuominen, T. Lindblom, E. Muukkonen

215

Dry Cleaning Technologies Using UV-Excited Radicals and Cryogenic Aerosols

Authors: Tadashi Ito, R. Sugino

219

A New HF Vapor Process for Native Oxide Removal, Suited for Cluster Applications

Authors: A.B. Storm, H. Sprey, J.W. Maes, E. Granneman, R. de Blank, Erika Röhr, Matty Caymax, Marc Heyns

225

Silicon Surface Cleaning for Low Temperature Silicon Epitaxial Growth

Authors: Masao Mayuzumi, M. Imai, S. Nakahara, Katsuya Inoue, J. Takahashi, Tadahiro Ohmi

229

Role of UV/Chlorine Exposure during Dry Surface Conditioning before Integrated Epi Deposition Process

Authors: Jerzy Ruzyllo, Erika Röhr, Matty Caymax, M. Baeyens, Thierry Conard, Paul W. Mertens, Marc Heyns

233

Electrical Evaluation of the Epi/Substrate Interface Quality after Different In-Situ and Ex-Situ Low-Temperature Pre-Epi Cleaning Methods

Authors: Matty Caymax, S. Decoutere, Erika Röhr, W. Vandervorst, Marc Heyns, H. Sprey, A.B. Storm, J.W. Maes

237

Energy Loss of O1s Photoelectrons in Compositional and Structural Transition Layer at and near the SiO₂/Si Interface

Authors: H. Nohira, Kunimasa Takahashi, Takeshi Hattori

241

Metal Enhanced Oxidation of Silicon

Authors: M. Börner, N. Junghans, S. Landau, Bernd O. Kolbesen

245

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