Paper Titles

Silicon Surface Cleaning for Low Temperature Silicon Epitaxial Growth
p.229

Role of UV/Chlorine Exposure during Dry Surface Conditioning before Integrated Epi Deposition Process
p.233

Electrical Evaluation of the Epi/Substrate Interface Quality after Different In-Situ and Ex-Situ Low-Temperature Pre-Epi Cleaning Methods
p.237

Energy Loss of O1s Photoelectrons in Compositional and Structural Transition Layer at and near the SiO₂/Si Interface
p.241

Metal Enhanced Oxidation of Silicon
p.245

Effect of Si Surface Roughness on the Current-Voltage Characteristics of Ultra-Thin Gate Oxides
p.249

Infrared Absorption Studies of Wet Chemical Oxides: Thermal Evolution of Impurities
p.253

X-Ray Photoelectron Study of Gate Oxides and Nitrides
p.257

Evaluation of C₃F₈ as an In-Situ Cleaning Gas for PECVD Tools
p.261

HomeSolid State PhenomenaSolid State Phenomena Vols. 65-66Metal Enhanced Oxidation of Silicon

Metal Enhanced Oxidation of Silicon

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Abstract:

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Ultra Clean Processing of Silicon Surfaces IV

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Periodical:

Solid State Phenomena (Volumes 65-66)

Pages:

245-248

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.65-66.245

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Online since:

November 1998

Authors:

M. Börner, N. Junghans, S. Landau, Bernd O. Kolbesen

Keywords:

Al Contamination, Cu Contamination, Enhanced Oxide Growth, SC-1 Solution

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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