Evaluation of C3F8 as an In-Situ Cleaning Gas for PECVD Tools

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Periodical:

Solid State Phenomena (Volumes 65-66)

Edited by:

Marc Heyns, Marc Meuris and Paul Mertens

Pages:

261-266

DOI:

10.4028/www.scientific.net/SSP.65-66.261

Citation:

R. Van San and L. Zazera, "Evaluation of C3F8 as an In-Situ Cleaning Gas for PECVD Tools", Solid State Phenomena, Vols. 65-66, pp. 261-266, 1999

Online since:

November 1998

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$35.00

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