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Evaluation of C₃F₈ as an In-Situ Cleaning Gas for PECVD Tools
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Generation at Point-of-Use of BHF
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HomeSolid State PhenomenaSolid State Phenomena Vols. 65-66Evaluation of C3F8 as an In-Situ Cleaning Gas for...

Evaluation of C₃F₈ as an In-Situ Cleaning Gas for PECVD Tools

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Ultra Clean Processing of Silicon Surfaces IV

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Periodical:

Solid State Phenomena (Volumes 65-66)

Pages:

261-266

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.65-66.261

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Online since:

November 1998

Authors:

R. Van San, L. Zazera

Keywords:

Cleaning, PECVD, Perfluorocarbons

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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