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Determination of SC1 Etch Rates at Low Temperatures with Microscope Interferometry
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Impact of Trace Metals in Litho Chemicals
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HomeSolid State PhenomenaSolid State Phenomena Vols. 65-66Impact of Trace Metals in Litho Chemicals

Impact of Trace Metals in Litho Chemicals

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Abstract:

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Ultra Clean Processing of Silicon Surfaces IV

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Periodical:

Solid State Phenomena (Volumes 65-66)

Pages:

279-282

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.65-66.279

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Online since:

November 1998

Authors:

Rita Vos, Marcel Lux, Marc Meuris, Paul W. Mertens, Marc Heyns, R. Ramage

Keywords:

Developer, Edge-Bead Remover, Lithography, Metal Contamination, Photoresist

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© 1999 Trans Tech Publications Ltd. All Rights Reserved

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