Post Metal Etch Polymer Removal: An Investigation of Parameters that Influence Corrosion

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Periodical:

Solid State Phenomena (Volumes 65-66)

Edited by:

Marc Heyns, Marc Meuris and Paul Mertens

Pages:

283-286

DOI:

10.4028/www.scientific.net/SSP.65-66.283

Citation:

W. Boullart et al., "Post Metal Etch Polymer Removal: An Investigation of Parameters that Influence Corrosion", Solid State Phenomena, Vols. 65-66, pp. 283-286, 1999

Online since:

November 1998

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$35.00

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