Electrical Evaluation of the Epi/Substrate Interface Quality after Different In-Situ and Ex-Situ Low-Temperature Pre-Epi Cleaning Methods

Abstract:

Article Preview

Info:

Periodical:

Solid State Phenomena (Volumes 65-66)

Edited by:

Marc Heyns, Marc Meuris and Paul Mertens

Pages:

237-240

DOI:

10.4028/www.scientific.net/SSP.65-66.237

Citation:

M. Caymax et al., "Electrical Evaluation of the Epi/Substrate Interface Quality after Different In-Situ and Ex-Situ Low-Temperature Pre-Epi Cleaning Methods", Solid State Phenomena, Vols. 65-66, pp. 237-240, 1999

Online since:

November 1998

Export:

Price:

$35.00

In order to see related information, you need to Login.