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HomeSolid State PhenomenaSolid State Phenomena Vols. 65-66

Solid State Phenomena Vols. 65-66

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.65-66

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Table of Contents

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Paper Title Page

Effect of Si Surface Roughness on the Current-Voltage Characteristics of Ultra-Thin Gate Oxides

Authors: M. Houssa, T. Nigam, Paul W. Mertens, Marc Heyns

249

Infrared Absorption Studies of Wet Chemical Oxides: Thermal Evolution of Impurities

Authors: Y.J. Chabal, M.K. Weldon, A.B. Gurevich, S.B. Christman

253

X-Ray Photoelectron Study of Gate Oxides and Nitrides

Authors: R.L. Opila, Jane P. Chang, M. Du, J. Bevk, Yuanqing Ma, M. Weldon, Y. Chabal, A.B. Gurevich

257

Evaluation of C₃F₈ as an In-Situ Cleaning Gas for PECVD Tools

Authors: R. Van San, L. Zazera

261

Generation at Point-of-Use of BHF

Authors: Steven Verhaverbeke, L.H. Liu

267

Characterization of HF Cleaning of Ion-Implanted Si Surfaces

Authors: E. Kondoh, Mikhail R. Baklanov, Karen Maex

271

Determination of SC1 Etch Rates at Low Temperatures with Microscope Interferometry

Authors: W. Storm, H.A. Gerber, G.-F. Hohl, M. Naujok, R. Schmolke

275

Impact of Trace Metals in Litho Chemicals

Authors: Rita Vos, Marcel Lux, Marc Meuris, Paul W. Mertens, Marc Heyns, R. Ramage

279

Post Metal Etch Polymer Removal: An Investigation of Parameters that Influence Corrosion

Authors: Werner Boullart, G. Mannaert, S. Graham, C. Tarassenko, L. Mouche

283

A Process Using Ozonated Water Solutions to Remove Photoresist after Metallization

Authors: S.L. Nelson, L.E. Carter

287

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