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Solid State Phenomena
Vols. 76-77
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Vols. 73-75
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Vol. 72
Solid State Phenomena
Vol. 71
Solid State Phenomena
Vols. 69-70
Solid State Phenomena
Vols. 67-68
Solid State Phenomena
Vols. 65-66
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Vols. 63-64
Solid State Phenomena
Vols. 61-62
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Vols. 59-60
Solid State Phenomena
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Vol. 56
Solid State Phenomena
Vol. 55

Solid State Phenomena Vols. 65-66

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.65-66

ToC:

Table of Contents

Paper Title Page

Post CMP Cleaning Using a Novel HF Compatible High Power Magasonic Tank
Authors: F. Tardif, T. Lardin, I. Constant, M. Fayolle, Pieter Boelen, C. Cowache, Ismail Kashkoush, R. Novak
169
Relation between Oxide-CMP Induced Defects and Post-CMP Cleaning Strategies
Authors: K. Devriendt, Evi Vrancken, N. Heylen, J. Grillaert, Marc Meuris, Marc Heyns, Z.C. Lin
173
Evaluation of Post Metal Etch Cleaning by Analyzing the Chemical Compositions and Distributions on the Etched Al Surface
Authors: Hua Ling Li, Mikhail R. Baklanov, Werner Boullart, Thierry Conard, B. Brijs, W. Vandervorst, Karen Maex, Ludo Froyen
177
New Methods for Contamination Control and Dry Cleaning of Silicon Wafers
Authors: G.S. Selwyn
181
Wafer Backside Cleaning by Twin-Fluid Flow Cleaning
Authors: Y. Tatehaba, Kazuo Kitagawa, Kunio Shimada, E. Ando
183
Evaluation of a Dry Laser Cleaning Process for the Removal of Surface Particles
Authors: Guy Vereecke, Erika Röhr, Marc Heyns
187
Dependency of Micro Particle Adhesion of Dispersive and Nondispersive Interactions Analyzed by Atomic Force Microscopy
Authors: A. Kawai, Kunio Shimada, E. Andoh
191
Integrated Cleaning: Application of Densified Fluid Cleaning (DFC) to Post-Etch Residue Removal
Authors: V. Starov, D. Beery, Alex Kabansky
195
Application of Microcalorimeter EDS X-Ray Detectors to Particle Analysis
Authors: Alain C. Diebold, D.A. Wollman, G.C. Hilton, K.D. Irwin, J.M. Martinis, Benjamin Y.H. Liu
199
Surface Characterization in the Silicon Cleaning Process by a-UPC; Atmospheric Ultraviolet Photoelectron Counting
Authors: Y. Kôzuki, Y. Nakajima, T. Sato, Kei Kinoshita, T. Tsunoda
203

Showing 41 to 50 of 71 Paper Titles

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