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Solid State Phenomena
Vols. 76-77
Solid State Phenomena
Vols. 73-75
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Vol. 72
Solid State Phenomena
Vol. 71
Solid State Phenomena
Vols. 69-70
Solid State Phenomena
Vols. 67-68
Solid State Phenomena
Vols. 65-66
Solid State Phenomena
Vols. 63-64
Solid State Phenomena
Vols. 61-62
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Vols. 59-60
Solid State Phenomena
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Solid State Phenomena
Vol. 56
Solid State Phenomena
Vol. 55

Solid State Phenomena Vols. 65-66

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.65-66

ToC:

Table of Contents

Paper Title Page

The Optimization of the Cleaning to Remove Residual Bonds of Si-C and Si-F after Fluorocarbon Plasma Etch on the Silicon Surface
Authors: Y.B. Kim, Mikhail R. Baklanov, Thierry Conard, Serge Vanhaelemeersch, W. Vandervorst
291

Showing 71 to 71 of 71 Paper Titles

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