Volumes

Solid State Phenomena
Vols. 69-70

Solid State Phenomena
Vols. 67-68

Solid State Phenomena
Vols. 65-66

Solid State Phenomena
Vols. 63-64

Solid State Phenomena
Vols. 61-62

Solid State Phenomena
Vols. 59-60

Solid State Phenomena
Vols. 57-58

Solid State Phenomena
Vol. 56

Solid State Phenomena
Vol. 55

Solid State Phenomena
Vol. 54

Solid State Phenomena
Vol. 53

Solid State Phenomena
Vols. 51-52

Solid State Phenomena
Vols. 49-50

HomeSolid State PhenomenaSolid State Phenomena Vols. 57-58

Solid State Phenomena Vols. 57-58

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.57-58

Export:

ToC:

Table of Contents

1
2
3
4
5
…
>
>>

Paper Title Page

Preface

Design: New Material Challenge for Silicon ULSI

Authors: Lionel C. Kimerling

1

Silicon Wafer Technology: The Challenges towards the Gigabit Era

Authors: A.P. Mozer

9

Hydrogen Annealed Silicon Wafer

Authors: S. Nadahara, H. Kubota, S. Samata

19

Formation of Microscopic Distribution of Grown-In Defects in Czochralski Silicon Crystal

Authors: R. Habu, Kazuto Kawakami, Mitsuhiro Hasebe

27

CZ Crystal Growth Development in Super Silicon Crystal Project

Authors: H. Yamagishi, M. Kuramoto, Y. Shiraishi, M. Machida, K. Takano, N. Takase, T. Iida, J. Matsubara, Kazuya Takada

37

Gettering by Voids in Silicon: A Comparison with other Techniques

Authors: Vito Raineri

43

Gettering in Advanced Low Temperature Processes

Authors: S. Sadamitsu, S. Ogushi, Y. Koike, N. Reilly, T. Nagashima, Mizuka Sano, H. Tsuya

53

Metal Gettering by Defective Regions in Carbon-Implanted Silicon

Authors: Reinhard Kögler, J.R. Kaschny, R.A. Yankov, P. Werner, A.B. Danilin, Wolfgang Skorupa

63

Metallic Impurity Gettering in MeV Implanted Si

Authors: O.V. Kononchuk, R.A. Brown, Sergei V. Koveshnikov, K.L. Beaman, F. Gonzalez, George A. Rozgonyi

69

1
2
3
4
5
…
>
>>