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HomeSolid State PhenomenaSolid State Phenomena Vols. 57-58

Solid State Phenomena Vols. 57-58

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.57-58

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Table of Contents

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Paper Title Page

Observation of Vacancy Enhancement during Rapid Thermal Annealing in Nitrogen

Authors: M. Jacob, P. Pichler, Heiner Ryssel, Robert J. Falster, M. Cornara, D. Gambaro, M. Olmo, M. Pagani

349

Strain and Gettering in Epitaxial Silicon Wafers

Authors: F.G. Kirscht, Mohammad B. Shabani, T. Yoshimi, Sang Bae Kim, B. Snegirev, Cheng Ming Wang, L. Williamson, K. Takashima, P. Taylor, D. Lange

355

Strain in Silicon below Si₃N₄ Stripes, Comparison between SUPREM IV Calculation and TEM/CBED Measurements

Authors: Aldo Armigliato, R. Balboni, S. Frabboni, A. Tixier, G.P. Carnevale, P. Colpani, A. Marmiroli

365

Defects Produced in Silicon by Reactive Ion Etching

Authors: H.B. Erzgräber, H.H. Richter, M.-A. Aminpur, A. Wolff, K. Blum

371

Depth Dependence of Dislocation Loop Dissolution Kinetics in Ion Implanted Silicon

Authors: Michael Seibt, Yue Long Huang, B. Plikat

377

Hydrogen Stimulated Destruction of Fe-B Pairs in p-Si

Authors: Eugene B. Yakimov, A.L. Parakhonsky

383

Differential Interference Contrast Microscopy of Defects in As-Grown and Annealed Si Wafers

Authors: M.-A. Trauwaert, Jan Vanhellemont, U. Lambert, D. Gräf, Karine Kenis, Paul W. Mertens, Marc Heyns

387

Effect of Stress Induced Defects on Electrical Properties of Czochralski Grown Silicon

Authors: Andrzej Misiuk, W. Jung, Barbara Surma, J. Jun, M. Rozental

393

Planar Solidification of Multicrystalline Silicon for Phtovoltaic Applications

Authors: Wolfgang Koch, C. Häßler, H.-U. Höfs, A. Müller, I.A. Schwirtlich

401

Implementation of Low Thermal Budget Techniques to Si and SiGe MOSFET Device Processing

Authors: M. Glück, J. Hersener, H.G. Umbach, J. Rappich, J. Stein

413

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