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HomeSolid State PhenomenaSolid State Phenomena Vols. 57-58Implementation of Low Thermal Budget Techniques to...

Implementation of Low Thermal Budget Techniques to Si and SiGe MOSFET Device Processing

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Gettering and Defect Engineering in Semiconductor Technology VII

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Periodical:

Solid State Phenomena (Volumes 57-58)

Pages:

413-418

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.57-58.413

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Online since:

July 1997

Authors:

M. Glück, J. Hersener, H.G. Umbach, J. Rappich, J. Stein

Keywords:

Hetero-MOSFETs, Low Thermal Budget Processing, Si/SiGe Heterodevices, Silicide

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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