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HomeSolid State PhenomenaSolid State Phenomena Vols. 57-58Effect of Stress Induced Defects on Electrical...

Effect of Stress Induced Defects on Electrical Properties of Czochralski Grown Silicon

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Gettering and Defect Engineering in Semiconductor Technology VII

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Periodical:

Solid State Phenomena (Volumes 57-58)

Pages:

393-400

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.57-58.393

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Online since:

July 1997

Authors:

Andrzej Misiuk, W. Jung, Barbara Surma, J. Jun, M. Rozental

Keywords:

Annealing, CZ-Si, Hydrostatic Pressure, Oxygen, Thermal Donor

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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