Differential Interference Contrast Microscopy of Defects in As-Grown and Annealed Si Wafers

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Periodical:

Solid State Phenomena (Volumes 57-58)

Edited by:

C. Claeys, J. Vanhellemont, H. Richter and M. Kittler

Pages:

387-392

DOI:

10.4028/www.scientific.net/SSP.57-58.387

Citation:

M.-A. Trauwaert et al., "Differential Interference Contrast Microscopy of Defects in As-Grown and Annealed Si Wafers", Solid State Phenomena, Vols. 57-58, pp. 387-392, 1997

Online since:

July 1997

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$35.00

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