Strain in Silicon below Si3N4 Stripes, Comparison between SUPREM IV Calculation and TEM/CBED Measurements

Abstract:

Article Preview

Info:

Periodical:

Solid State Phenomena (Volumes 57-58)

Edited by:

C. Claeys, J. Vanhellemont, H. Richter and M. Kittler

Pages:

365-370

DOI:

10.4028/www.scientific.net/SSP.57-58.365

Citation:

A. Armigliato et al., "Strain in Silicon below Si3N4 Stripes, Comparison between SUPREM IV Calculation and TEM/CBED Measurements", Solid State Phenomena, Vols. 57-58, pp. 365-370, 1997

Online since:

July 1997

Export:

Price:

$35.00

In order to see related information, you need to Login.