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HomeSolid State PhenomenaSolid State Phenomena Vols. 57-58Point Defect and Microdefect Dynamics in...

Point Defect and Microdefect Dynamics in Czochralski-Grown Silicon: Simulations and Analysis of Self-Consistent Models

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Gettering and Defect Engineering in Semiconductor Technology VII

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Periodical:

Solid State Phenomena (Volumes 57-58)

Pages:

343-348

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.57-58.343

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Online since:

July 1997

Authors:

T. Sinno, R.A. Brown

Keywords:

Continuum Simulation, Defect Dynamics, Oxidation-Induced Stacking-Fault Ring, Point Defect Thermophysical Properties

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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