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HomeSolid State PhenomenaSolid State Phenomena Vols. 57-58Deformation Interaction of Defects in Crystal:...

Deformation Interaction of Defects in Crystal: Concept of Evaluation

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Gettering and Defect Engineering in Semiconductor Technology VII

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Periodical:

Solid State Phenomena (Volumes 57-58)

Pages:

319-326

DOI:

https://doi.org/10.4028/www.scientific.net/SSP.57-58.319

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Online since:

July 1997

Authors:

M.D. Efremov

Keywords:

Defect, Deformation, Interaction, Silicon, Strain, Stress

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© 1997 Trans Tech Publications Ltd. All Rights Reserved

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